8/24/2010	11:51:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2010	11:51:34 AM	Recipe started at 11:51 AM
8/24/2010	11:51:34 AM	H2 valve closed
8/24/2010	11:51:34 AM	BCl3 valve closed
8/24/2010	11:51:34 AM	PH3 valve closed
8/24/2010	11:51:34 AM	SiCl4 pre valve closed
8/24/2010	11:51:34 AM	SiCl4 post valve closed
8/24/2010	11:51:34 AM	Main Vac valve closed
8/24/2010	11:51:34 AM	Bypass valve closed
8/24/2010	11:51:34 AM	Bubbler valve closed
8/24/2010	11:51:34 AM	Helium valve opened
8/24/2010	11:51:34 AM	Helium MFC set to  500.000000
8/24/2010	11:51:34 AM	H2 MFC set to  0.000000
8/24/2010	11:51:34 AM	BCl3 MFC set to  0.000000
8/24/2010	11:51:34 AM	PHl3 MFC set to  0.000000
8/24/2010	11:51:34 AM	SiCl4 MFC set to  0.000000
8/24/2010	11:51:34 AM	Bypass solenoid MFC set to  0.000000
8/24/2010	11:51:34 AM	Tube furnace set to 0
8/24/2010	11:52:55 AM	Helium valve closed
8/24/2010	11:52:55 AM	H2 valve closed
8/24/2010	11:52:55 AM	BCl3 valve closed
8/24/2010	11:52:55 AM	PH3 valve closed
8/24/2010	11:52:55 AM	SiCl4 pre valve closed
8/24/2010	11:52:55 AM	SiCl4 post valve closed
8/24/2010	11:52:55 AM	Main Vac valve closed
8/24/2010	11:52:55 AM	Bypass valve closed
8/24/2010	11:52:55 AM	Bubbler valve closed
8/24/2010	11:52:55 AM	Helium MFC set to  0.000000
8/24/2010	11:52:55 AM	H2 MFC set to  0.000000
8/24/2010	11:52:55 AM	BCl3 MFC set to  0.000000
8/24/2010	11:52:55 AM	PHl3 MFC set to  0.000000
8/24/2010	11:52:55 AM	SiCl4 MFC set to  0.000000
8/24/2010	11:52:55 AM	Bypass solenoid MFC set to  0.000000
8/24/2010	11:52:55 AM	Tube furnace set to 0
8/24/2010	11:52:55 AM	Run finished at 11:52 AM
8/24/2010	11:52:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2010	11:55:09 AM	Program exited cleanly
8/24/2010	12:06:51 PM	Program started normally
8/24/2010	12:06:51 PM	Helium valve closed
8/24/2010	12:06:51 PM	H2 valve closed
8/24/2010	12:06:51 PM	BCl3 valve closed
8/24/2010	12:06:51 PM	PH3 valve closed
8/24/2010	12:06:51 PM	SiCl4 pre valve closed
8/24/2010	12:06:51 PM	SiCl4 post valve closed
8/24/2010	12:06:51 PM	Main Vac valve closed
8/24/2010	12:06:51 PM	Bypass valve closed
8/24/2010	12:06:51 PM	Bubbler valve closed
8/24/2010	12:06:51 PM	Helium MFC set to  0.000000
8/24/2010	12:06:51 PM	H2 MFC set to  0.000000
8/24/2010	12:06:51 PM	BCl3 MFC set to  0.000000
8/24/2010	12:06:51 PM	PHl3 MFC set to  0.000000
8/24/2010	12:06:51 PM	SiCl4 MFC set to  0.000000
8/24/2010	12:06:51 PM	Bypass solenoid MFC set to  760.000000
8/24/2010	12:06:52 PM	Tube furnace set to 0
8/24/2010	12:07:46 PM	Recipe started at 12:07 PM
8/24/2010	12:07:46 PM	Helium valve closed
8/24/2010	12:07:46 PM	BCl3 valve closed
8/24/2010	12:07:46 PM	PH3 valve closed
8/24/2010	12:07:46 PM	SiCl4 pre valve closed
8/24/2010	12:07:46 PM	SiCl4 post valve closed
8/24/2010	12:07:46 PM	Main Vac valve closed
8/24/2010	12:07:46 PM	Bypass valve closed
8/24/2010	12:07:46 PM	Bubbler valve closed
8/24/2010	12:07:46 PM	H2 valve opened
8/24/2010	12:07:46 PM	Helium MFC set to  0.000000
8/24/2010	12:07:46 PM	H2 MFC set to  500.000000
8/24/2010	12:07:46 PM	BCl3 MFC set to  0.000000
8/24/2010	12:07:46 PM	PHl3 MFC set to  0.000000
8/24/2010	12:07:46 PM	SiCl4 MFC set to  0.000000
8/24/2010	12:07:46 PM	Bypass solenoid MFC set to  0.000000
8/24/2010	12:07:46 PM	Tube furnace set to 0
8/24/2010	12:07:49 PM	Helium valve closed
8/24/2010	12:07:49 PM	BCl3 valve closed
8/24/2010	12:07:49 PM	PH3 valve closed
8/24/2010	12:07:49 PM	SiCl4 pre valve closed
8/24/2010	12:07:49 PM	SiCl4 post valve closed
8/24/2010	12:07:49 PM	Main Vac valve closed
8/24/2010	12:07:49 PM	Bypass valve closed
8/24/2010	12:07:49 PM	H2 valve opened
8/24/2010	12:07:49 PM	Bubbler valve opened
8/24/2010	12:07:49 PM	Helium MFC set to  0.000000
8/24/2010	12:07:49 PM	H2 MFC set to  500.000000
8/24/2010	12:07:49 PM	BCl3 MFC set to  0.000000
8/24/2010	12:07:49 PM	PHl3 MFC set to  0.000000
8/24/2010	12:07:49 PM	SiCl4 MFC set to  0.000000
8/24/2010	12:07:49 PM	Bypass solenoid MFC set to  0.000000
8/24/2010	12:07:49 PM	Tube furnace set to 0
8/24/2010	12:07:54 PM	Helium valve closed
8/24/2010	12:07:54 PM	BCl3 valve closed
8/24/2010	12:07:54 PM	PH3 valve closed
8/24/2010	12:07:54 PM	SiCl4 pre valve closed
8/24/2010	12:07:54 PM	SiCl4 post valve closed
8/24/2010	12:07:54 PM	Main Vac valve closed
8/24/2010	12:07:54 PM	Bypass valve closed
8/24/2010	12:07:54 PM	Bubbler valve closed
8/24/2010	12:07:54 PM	H2 valve opened
8/24/2010	12:07:54 PM	Helium MFC set to  0.000000
8/24/2010	12:07:54 PM	H2 MFC set to  500.000000
8/24/2010	12:07:54 PM	BCl3 MFC set to  0.000000
8/24/2010	12:07:54 PM	PHl3 MFC set to  0.000000
8/24/2010	12:07:54 PM	SiCl4 MFC set to  0.000000
8/24/2010	12:07:54 PM	Bypass solenoid MFC set to  0.000000
8/24/2010	12:07:54 PM	Tube furnace set to 700
8/24/2010	12:07:59 PM	Run aborted at 12:07 PM
8/24/2010	12:07:59 PM	Helium valve closed
8/24/2010	12:07:59 PM	H2 valve closed
8/24/2010	12:07:59 PM	BCl3 valve closed
8/24/2010	12:07:59 PM	PH3 valve closed
8/24/2010	12:07:59 PM	SiCl4 pre valve closed
8/24/2010	12:07:59 PM	SiCl4 post valve closed
8/24/2010	12:07:59 PM	Bypass valve closed
8/24/2010	12:07:59 PM	Main Vac valve closed
8/24/2010	12:07:59 PM	Bubbler valve closed
8/24/2010	12:07:59 PM	Helium MFC set to  0.000000
8/24/2010	12:07:59 PM	H2 MFC set to  0.000000
8/24/2010	12:07:59 PM	BCl3 MFC set to  0.000000
8/24/2010	12:07:59 PM	PHl3 MFC set to  0.000000
8/24/2010	12:07:59 PM	SiCl4 MFC set to  0.000000
8/24/2010	12:07:59 PM	Tube furnace set to 0
8/24/2010	12:09:19 PM	Recipe started at 12:09 PM
8/24/2010	12:09:19 PM	Helium valve closed
8/24/2010	12:09:19 PM	BCl3 valve closed
8/24/2010	12:09:19 PM	PH3 valve closed
8/24/2010	12:09:19 PM	SiCl4 pre valve closed
8/24/2010	12:09:19 PM	SiCl4 post valve closed
8/24/2010	12:09:19 PM	Main Vac valve closed
8/24/2010	12:09:19 PM	Bypass valve closed
8/24/2010	12:09:19 PM	Bubbler valve closed
8/24/2010	12:09:19 PM	H2 valve opened
8/24/2010	12:09:19 PM	Helium MFC set to  0.000000
8/24/2010	12:09:19 PM	H2 MFC set to  500.000000
8/24/2010	12:09:19 PM	BCl3 MFC set to  0.000000
8/24/2010	12:09:19 PM	PHl3 MFC set to  0.000000
8/24/2010	12:09:19 PM	SiCl4 MFC set to  0.000000
8/24/2010	12:09:19 PM	Bypass solenoid MFC set to  0.000000
8/24/2010	12:09:20 PM	Tube furnace set to 0
8/24/2010	12:09:20 PM	Helium valve closed
8/24/2010	12:09:20 PM	BCl3 valve closed
8/24/2010	12:09:20 PM	PH3 valve closed
8/24/2010	12:09:20 PM	SiCl4 pre valve closed
8/24/2010	12:09:20 PM	SiCl4 post valve closed
8/24/2010	12:09:20 PM	Main Vac valve closed
8/24/2010	12:09:20 PM	Bypass valve closed
8/24/2010	12:09:20 PM	H2 valve opened
8/24/2010	12:09:20 PM	Bubbler valve opened
8/24/2010	12:09:20 PM	Helium MFC set to  0.000000
8/24/2010	12:09:20 PM	H2 MFC set to  500.000000
8/24/2010	12:09:20 PM	BCl3 MFC set to  0.000000
8/24/2010	12:09:20 PM	PHl3 MFC set to  0.000000
8/24/2010	12:09:20 PM	SiCl4 MFC set to  0.000000
8/24/2010	12:09:20 PM	Bypass solenoid MFC set to  0.000000
8/24/2010	12:09:20 PM	Tube furnace set to 0
8/24/2010	12:09:27 PM	Helium valve closed
8/24/2010	12:09:27 PM	BCl3 valve closed
8/24/2010	12:09:27 PM	PH3 valve closed
8/24/2010	12:09:27 PM	SiCl4 pre valve closed
8/24/2010	12:09:27 PM	SiCl4 post valve closed
8/24/2010	12:09:27 PM	Main Vac valve closed
8/24/2010	12:09:27 PM	Bypass valve closed
8/24/2010	12:09:27 PM	Bubbler valve closed
8/24/2010	12:09:27 PM	H2 valve opened
8/24/2010	12:09:27 PM	Helium MFC set to  0.000000
8/24/2010	12:09:27 PM	H2 MFC set to  500.000000
8/24/2010	12:09:27 PM	BCl3 MFC set to  0.000000
8/24/2010	12:09:27 PM	PHl3 MFC set to  0.000000
8/24/2010	12:09:27 PM	SiCl4 MFC set to  0.000000
8/24/2010	12:09:27 PM	Bypass solenoid MFC set to  0.000000
8/24/2010	12:09:27 PM	Tube furnace set to 0
8/24/2010	12:09:32 PM	Run aborted at 12:09 PM
8/24/2010	12:09:32 PM	Helium valve closed
8/24/2010	12:09:32 PM	H2 valve closed
8/24/2010	12:09:32 PM	BCl3 valve closed
8/24/2010	12:09:32 PM	PH3 valve closed
8/24/2010	12:09:32 PM	SiCl4 pre valve closed
8/24/2010	12:09:32 PM	SiCl4 post valve closed
8/24/2010	12:09:32 PM	Bypass valve closed
8/24/2010	12:09:32 PM	Main Vac valve closed
8/24/2010	12:09:32 PM	Bubbler valve closed
8/24/2010	12:09:32 PM	Helium MFC set to  0.000000
8/24/2010	12:09:32 PM	H2 MFC set to  0.000000
8/24/2010	12:09:32 PM	BCl3 MFC set to  0.000000
8/24/2010	12:09:32 PM	PHl3 MFC set to  0.000000
8/24/2010	12:09:32 PM	SiCl4 MFC set to  0.000000
8/24/2010	12:09:32 PM	Tube furnace set to 0
8/24/2010	1:16:42 PM	H2 MFC set to  500.000000
8/24/2010	1:16:46 PM	H2 valve opened
8/24/2010	1:16:47 PM	Bubbler valve opened
8/24/2010	1:48:19 PM	Tube furnace set to 700
8/24/2010	2:56:37 PM	Tube furnace set to 0
8/24/2010	4:20:05 PM	Bubbler valve closed
8/24/2010	4:20:06 PM	H2 valve closed
8/24/2010	5:22:43 PM	H2 valve opened
8/24/2010	5:22:45 PM	Bubbler valve opened
8/24/2010	5:40:31 PM	Tube furnace set to 700
8/24/2010	6:44:13 PM	H2 valve closed
8/24/2010	6:44:20 PM	H2 valve opened
8/24/2010	6:44:23 PM	Tube furnace set to 0
8/24/2010	7:02:32 PM	Bubbler valve closed
8/24/2010	7:02:33 PM	H2 valve closed
8/24/2010	7:04:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2010	7:04:43 PM	Recipe started at 7:04 PM
8/24/2010	7:04:43 PM	Helium valve closed
8/24/2010	7:04:43 PM	H2 valve closed
8/24/2010	7:04:43 PM	BCl3 valve closed
8/24/2010	7:04:43 PM	PH3 valve closed
8/24/2010	7:04:43 PM	SiCl4 pre valve closed
8/24/2010	7:04:43 PM	SiCl4 post valve closed
8/24/2010	7:04:43 PM	Main Vac valve closed
8/24/2010	7:04:43 PM	Bubbler valve closed
8/24/2010	7:04:43 PM	Bypass valve opened
8/24/2010	7:04:43 PM	Helium MFC set to  0.000000
8/24/2010	7:04:43 PM	H2 MFC set to  0.000000
8/24/2010	7:04:43 PM	BCl3 MFC set to  0.000000
8/24/2010	7:04:43 PM	PHl3 MFC set to  0.000000
8/24/2010	7:04:43 PM	SiCl4 MFC set to  0.000000
8/24/2010	7:04:43 PM	Bypass solenoid MFC set to  0.000000
8/24/2010	7:04:43 PM	Tube furnace set to 0
8/24/2010	7:05:16 PM	Helium valve closed
8/24/2010	7:05:16 PM	H2 valve closed
8/24/2010	7:05:16 PM	BCl3 valve closed
8/24/2010	7:05:16 PM	PH3 valve closed
8/24/2010	7:05:16 PM	SiCl4 pre valve closed
8/24/2010	7:05:16 PM	SiCl4 post valve closed
8/24/2010	7:05:16 PM	Bubbler valve closed
8/24/2010	7:05:16 PM	Main Vac valve opened
8/24/2010	7:05:16 PM	Bypass valve opened
8/24/2010	7:05:16 PM	Helium MFC set to  0.000000
8/24/2010	7:05:16 PM	H2 MFC set to  0.000000
8/24/2010	7:05:16 PM	BCl3 MFC set to  0.000000
8/24/2010	7:05:16 PM	PHl3 MFC set to  0.000000
8/24/2010	7:05:16 PM	SiCl4 MFC set to  0.000000
8/24/2010	7:05:16 PM	Bypass solenoid MFC set to  0.000000
8/24/2010	7:05:16 PM	Tube furnace set to 0
8/24/2010	7:05:17 PM	Run finished at 7:05 PM
8/24/2010	7:05:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
